Thomas Trautzsch

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and appliance for predicting the imaging result obtained wit...
- Patent number 10,788,748
- Issue date Sep 29, 2020
- Carl Zeiss SMT GmbH
- Thomas Thaler
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for determining an OPC model
- Patent number 10,539,865
- Issue date Jan 21, 2020
- Carl Zeiss SMT GmbH
- Holger Seitz
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for examining a mask
- Patent number 9,869,640
- Issue date Jan 16, 2018
- Carl Zeiss SMT GmbH
- Thomas Trautzsch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microscope and method for characterizing structures on an object
- Patent number 9,268,124
- Issue date Feb 23, 2016
- Carl Zeiss SMS GmbH
- Holger Seitz
- G02 - OPTICS
Information Patent Grant
Monitoring of time-varying defect classification performance
- Patent number 8,537,349
- Issue date Sep 17, 2013
- KLA-Tencor Corporation
- Patrick Huet
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPLIANCE FOR PREDICTING THE IMAGING RESULT OBTAINED WIT...
- Publication number 20190107776
- Publication date Apr 11, 2019
- Carl Zeiss SMT GMBH
- Thomas Thaler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR DETERMINING AN OPC MODEL
- Publication number 20180095358
- Publication date Apr 5, 2018
- Carl Zeiss SMT GMBH
- Holger Seitz
- G01 - MEASURING TESTING
Information Patent Application
Method and device for examining a mask
- Publication number 20150198541
- Publication date Jul 16, 2015
- CARL ZEISS SMS GMBH
- Thomas Trautzsch
- G01 - MEASURING TESTING
Information Patent Application
MICROSCOPE AND METHOD FOR CHARACTERIZING STRUCTURES ON AN OBJECT
- Publication number 20130321609
- Publication date Dec 5, 2013
- Holger Seitz
- G02 - OPTICS
Information Patent Application
MONITORING OF TIME-VARYING DEFECT CLASSIFICATION PERFORMANCE
- Publication number 20110224932
- Publication date Sep 15, 2011
- KLA-Tencor Corporation
- Patrick Huet
- G05 - CONTROLLING REGULATING