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Thomas Waddle
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Phoenix, AZ, US
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last 30 patents
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Patent Grant
Workpiece cleaning element with improved rib configuration
Patent number
6,006,391
Issue date
Dec 28, 1999
SpeedFam-IPEC Corporation
Eric Shurtliff
B08 - CLEANING
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Patent Grant
Methods and apparatus for polishing using an improved plate stabilizer
Patent number
5,980,366
Issue date
Nov 9, 1999
SpeedFam-IPEC Corporation
Thomas Waddle
B24 - GRINDING POLISHING