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Thomas Willkens
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Aalen, DE
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last 30 patents
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Patent Grant
Method of manufacturing an optical element
Patent number
7,738,117
Issue date
Jun 15, 2010
Carl Zeiss SMT AG
Michael Altenberger
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Method of manufacturing an optical element
Publication number
20080117436
Publication date
May 22, 2008
Carl Zeiss SMT AG
Michael Altenberger
G01 - MEASURING TESTING