Thomas Wolfsteiner

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Component for a projection exposure apparatus
- Patent number 10,866,528
- Issue date Dec 15, 2020
- Carl Zeiss SMT GmbH
- Thomas Wolfsteiner
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
CONNECTOR ASSEMBLY, SYSTEM AND LITHOGRAPHY INSTALLATION
- Publication number 20220200181
- Publication date Jun 23, 2022
- Carl Zeiss SMT GMBH
- Thomas Wolfsteiner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT FOR A PROJECTION EXPOSURE APPARATUS
- Publication number 20190324372
- Publication date Oct 24, 2019
- Carl Zeiss SMT GMBH
- Thomas Wolfsteiner
- G02 - OPTICS