Membership
Tour
Register
Log in
Thor Eusner
Follow
Person
Millwood, NY, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Chemical-mechanical polishing pad conditioning system
Patent number
8,758,091
Issue date
Jun 24, 2014
Massachusetts Institute of Technology
Nannaji Saka
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
CHEMICAL-MECHANICAL POLISHING PAD CONDITIONING SYSTEM
Publication number
20110244764
Publication date
Oct 6, 2011
Massachusetts Institute of Technology
Nannaji Saka
B24 - GRINDING POLISHING