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Thorgard Zainer
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Burghausen, DE
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Patent Grant
Process for the manufacture of trichlorosilane and silicon tetrachl...
Patent number
4,130,632
Issue date
Dec 19, 1978
Wacker-Chemitronic Gesellschaft fur Elecktronik-Grundstoffe mbH
Johann Braunsperger
C01 - INORGANIC CHEMISTRY