Thorsten Hulsmann

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Dornstadt, DE

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Patents Grantslast 30 patents

Information Patent Grant
Support plate for localized heating in thermal processing systems
- Patent number 11,521,868
- Issue date Dec 6, 2022
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for the thermal treatment of disk-shaped substrates
- Patent number 7,704,898
- Issue date Apr 27, 2010
- Mattson Technology, Inc.
- Zsolt Nenyei
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20190295869
- Publication date Sep 26, 2019
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for the Thermal Treatment of Disk-Shaped Substrates
- Publication number 20080311761
- Publication date Dec 18, 2008
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS