Thorsten Mueller

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Reultingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for capping a MEMS wafer and MEMS wafer
- Patent number 8,470,630
- Issue date Jun 25, 2013
- Robert Bosch GmbH
- Joachim Rudhard
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method for Capping a MEMS Wafer and MEMS Wafer
- Publication number 20110127622
- Publication date Jun 2, 2011
- ROBERT BOSCH GmbH
- Joachim Rudhard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EXHAUST GAS TREATMENT DEVICE FOR A CVD DEVICE, CVD DEVICE, AND EXHA...
- Publication number 20110083606
- Publication date Apr 14, 2011
- Joachim Rudhard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...