Thuc Dinh

Person

Shakopee, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for vapor generation and film deposition
- Patent number 10,287,679
- Issue date May 14, 2019
- MSP Corporation
- Thuc M. Dinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for vapor generation and film deposition
- Patent number 9,797,593
- Issue date Oct 24, 2017
- MSP Corporation
- Thuc M. Dinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for vapor and gas filtration
- Patent number 9,089,800
- Issue date Jul 28, 2015
- MSP Corporation
- Benjamin Y. H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fine droplet atomization for liquid precursor vaporization
- Patent number 8,986,784
- Issue date Mar 24, 2015
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for vapor generation and wafer cleaning
- Patent number 8,945,281
- Issue date Feb 3, 2015
- MSP Corporation
- Thuc M. Dinh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid flow control for film deposition
- Patent number 8,783,652
- Issue date Jul 22, 2014
- MPS Corporation
- Thuc M. Dinh
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus for vapor condensation and recovery
- Patent number 8,728,240
- Issue date May 20, 2014
- MSP Corporation
- Benjamin Y. H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for counting particles in a gas
- Patent number 8,711,338
- Issue date Apr 29, 2014
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for counting particles in a gas
- Patent number 8,603,247
- Issue date Dec 10, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for generating vapor at high rates
- Patent number 8,554,064
- Issue date Oct 8, 2013
- MSP Corporation
- Thuc Dinh
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Fine droplet atomizer for liquid precursor vaporization
- Patent number 8,511,583
- Issue date Aug 20, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for counting particles in a gas
- Patent number 8,465,791
- Issue date Jun 18, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for particle filtration and enhancing tool per...
- Patent number 8,297,223
- Issue date Oct 30, 2012
- MSP Corporation
- Benjamin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for vapor generation and film deposition
- Publication number 20180044789
- Publication date Feb 15, 2018
- MSP Corporation
- Thuc M. Dinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for vapor generation and film deposition
- Publication number 20160334099
- Publication date Nov 17, 2016
- MSP Corporation
- Thuc M. Dinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Air conditioning system with vapor bypassing
- Publication number 20160091228
- Publication date Mar 31, 2016
- MSP Corporation
- Amir A. Naqwi
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Apparatus for filtration and gas-vapor mixing in thin film deposition
- Publication number 20140096715
- Publication date Apr 10, 2014
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated system for vapor generation and thin film deposition
- Publication number 20130312674
- Publication date Nov 28, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
Fine droplet atomizer for liquid precursor vaporization
- Publication number 20130292485
- Publication date Nov 7, 2013
- Benjamin Y.H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Apparatus for vapor condensation and recovery
- Publication number 20130295749
- Publication date Nov 7, 2013
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for vapor condensation and recovery
- Publication number 20130295776
- Publication date Nov 7, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for counting particles in a gas
- Publication number 20130239888
- Publication date Sep 19, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Liquid flow control for film deposition
- Publication number 20130233395
- Publication date Sep 12, 2013
- Thuc M. Dinh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for vapor and gas filtration
- Publication number 20130203264
- Publication date Aug 8, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for counting particles in a gas
- Publication number 20130036973
- Publication date Feb 14, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Integrated system for vapor generation and thin film deposition
- Publication number 20110232588
- Publication date Sep 29, 2011
- MSP Corporation
- Benjamin Y.H. Liu
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
Fine droplet atomizer for liquid precursor vaporization
- Publication number 20110192909
- Publication date Aug 11, 2011
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for counting particles in a gas
- Publication number 20110091649
- Publication date Apr 21, 2011
- MSP Corporation
- Benjamin Y.H. Liu
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for filtration and gas-vapor mixing in thin film deposition
- Publication number 20090293807
- Publication date Dec 3, 2009
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PARTICLE FILTRATION AND ENHANCING TOOL PER...
- Publication number 20090084315
- Publication date Apr 2, 2009
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Apparatus and method for vapor generation and film deposition

Apparatus and method for vapor generation and film deposition

Method and apparatus for vapor and gas filtration

Fine droplet atomization for liquid precursor vaporization

Method and apparatus for vapor generation and wafer cleaning

Liquid flow control for film deposition

Apparatus for vapor condensation and recovery

Apparatus for counting particles in a gas

Apparatus for counting particles in a gas

Method and apparatus for generating vapor at high rates

Fine droplet atomizer for liquid precursor vaporization

Method for counting particles in a gas

Method and apparatus for particle filtration and enhancing tool per...

Patents Applicationslast 30 patents

Apparatus and method for vapor generation and film deposition

Apparatus and method for vapor generation and film deposition

Air conditioning system with vapor bypassing

Apparatus for filtration and gas-vapor mixing in thin film deposition

Integrated system for vapor generation and thin film deposition

Fine droplet atomizer for liquid precursor vaporization

Apparatus for vapor condensation and recovery

Method for vapor condensation and recovery

Apparatus for counting particles in a gas

Liquid flow control for film deposition

Method and apparatus for vapor and gas filtration

Method and apparatus for counting particles in a gas

Integrated system for vapor generation and thin film deposition

Fine droplet atomizer for liquid precursor vaporization

Method and apparatus for counting particles in a gas

Apparatus for filtration and gas-vapor mixing in thin film deposition

METHOD AND APPARATUS FOR PARTICLE FILTRATION AND ENHANCING TOOL PER...