Thure Boehm

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Mirror, projection objective with such mirror, and projection expos...
- Patent number 9,575,224
- Issue date Feb 21, 2017
- Carl Zeiss SMT GmbH
- Rolf Freimann
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Repair method for optical elements having a coating and correspondi...
- Patent number 8,795,839
- Issue date Aug 5, 2014
- Carl Zeiss SMT GmbH
- Thure Boehm
- G02 - OPTICS
Information Patent Grant
Method of making a fracture-resistant calcium fluoride single cryst...
- Patent number 6,740,159
- Issue date May 25, 2004
- Schott Glas
- Joerg Kandler
- G02 - OPTICS
Information Patent Grant
Holding device for an optical element made of a crystalline material
- Patent number 6,667,839
- Issue date Dec 23, 2003
- Carl Zeiss SMT AG
- Jürgen Hartmaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MIRROR, PROJECTION OBJECTIVE WITH SUCH MIRROR, AND PROJECTION EXPOS...
- Publication number 20130286471
- Publication date Oct 31, 2013
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING AN ELEMENT HAVING AT LEAST ONE...
- Publication number 20100033696
- Publication date Feb 11, 2010
- Carl Zeiss SMT AG
- Thure BOEHM
- B24 - GRINDING POLISHING
Information Patent Application
REPAIR METHOD FOR OPTICAL ELEMENTS HAVING A COATING AND CORRESPONDI...
- Publication number 20090174934
- Publication date Jul 9, 2009
- Carl Zeiss SMT AG
- Thure BOEHM
- G02 - OPTICS
Information Patent Application
IMAGING SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM
- Publication number 20070024982
- Publication date Feb 1, 2007
- Carl Zeiss SMT AG
- Franz Josef Stickel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of making a fracture-resistant calcium fluoride single cryst...
- Publication number 20030101923
- Publication date Jun 5, 2003
- Joerg Kandler
- C30 - CRYSTAL GROWTH
Information Patent Application
Holding device for an optical element made of a crystalline material
- Publication number 20020108928
- Publication date Aug 15, 2002
- Carl Zeiss Semiconductor Manufacturing Technologies, AG
- Jurgen Hartmaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Thure Boehm

Person

Patents Grantslast 30 patents

Mirror, projection objective with such mirror, and projection expos...

Repair method for optical elements having a coating and correspondi...

Method of making a fracture-resistant calcium fluoride single cryst...

Holding device for an optical element made of a crystalline material

Patents Applicationslast 30 patents

MIRROR, PROJECTION OBJECTIVE WITH SUCH MIRROR, AND PROJECTION EXPOS...

METHOD AND APPARATUS FOR PRODUCING AN ELEMENT HAVING AT LEAST ONE...

REPAIR METHOD FOR OPTICAL ELEMENTS HAVING A COATING AND CORRESPONDI...

IMAGING SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM

Method of making a fracture-resistant calcium fluoride single cryst...

Holding device for an optical element made of a crystalline material