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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and illumination uniformity correction system
- Patent number 11,656,555
- Issue date May 23, 2023
- ASML Holding N.V.
- Janardan Nath
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror array
- Patent number 10,845,706
- Issue date Nov 24, 2020
- ASML Netherlands B.V.
- Marco Matheus Louis Steeghs
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION
- Publication number 20230035511
- Publication date Feb 2, 2023
- ASML NETHERLANDS B.V.
- Ronny DER KINDEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTIMIZATION USING A NON-UNIFORM ILLUMINATION INTENSITY PROFILE
- Publication number 20220390832
- Publication date Dec 8, 2022
- ASML Holding N.V.
- Janardan NATH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM
- Publication number 20220214622
- Publication date Jul 7, 2022
- ASML Holding N.V.
- Janardan NATH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mirror Array
- Publication number 20200033734
- Publication date Jan 30, 2020
- ASML NETHERLANDS B.V.
- Marco, Matheus, Louis Steeghs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY