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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and composition for electrochemical mechanical polishing pro...
Patent number
7,390,429
Issue date
Jun 24, 2008
Applied Materials, Inc.
Feng Q. Liu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and composition for polishing a substrate
Patent number
7,323,416
Issue date
Jan 29, 2008
Applied Materials, Inc.
Feng Q. Liu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Polishing Composition and Polishing Method Using the Same
Publication number
20100038584
Publication date
Feb 18, 2010
FUJIMI INCORPORATED
Tianbao DU
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND COMPOSITION FOR POLISHING A SUBSTRATE
Publication number
20070290166
Publication date
Dec 20, 2007
Feng Q. Liu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Method and apparatus for electrochemical mechanical polishing of cu...
Publication number
20070251832
Publication date
Nov 1, 2007
APPLIED MATERIALS, INC.
Tianbao Du
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Information
Patent Application
Polishing method that suppresses hillock formation
Publication number
20070235345
Publication date
Oct 11, 2007
APPLIED MATERIALS, INC.
Tianbao Du
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Information
Patent Application
Removal profile tuning by adjusting conditioning sweep profile on a...
Publication number
20070227902
Publication date
Oct 4, 2007
APPLIED MATERIALS, INC.
Tianbao Du
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Information
Patent Application
Novel rinse solution to remove cross-contamination
Publication number
20070219103
Publication date
Sep 20, 2007
APPLIED MATERIALS, INC.
Tianbao Du
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for electrochemically polishing a conductive material on a s...
Publication number
20070187258
Publication date
Aug 16, 2007
Tianbao Du
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Information
Patent Application
Method and composition for polishing a substrate
Publication number
20060169597
Publication date
Aug 3, 2006
APPLIED MATERIALS, INC.
Feng Q. Liu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and composition for electrochemical mechanical polishing pro...
Publication number
20060102872
Publication date
May 18, 2006
APPLIED MATERIALS, INC.
Feng Q. Liu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and composition for polishing a substrate
Publication number
20060006074
Publication date
Jan 12, 2006
Feng Q. Liu
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