Tianhui LI

Person

  • Shanghai, CN

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    EXPOSURE DEVICE AND EXPOSURE METHOD

    • Publication number 20140063480
    • Publication date Mar 6, 2014
    • SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
    • Qiang WU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    LITHOGRAPHY MACHINE AND SCANNING AND EXPOSING METHOD THEREOF

    • Publication number 20130169946
    • Publication date Jul 4, 2013
    • SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
    • Qiang WU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY