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Shanghai, CN
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last 30 patents
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Patent Grant
Exposure device and exposure method
Patent number
9,223,229
Issue date
Dec 29, 2015
Semiconductor Manufacturing International Corp
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography machine and scanning and exposing method thereof
Patent number
9,134,624
Issue date
Sep 15, 2015
Semiconductor Manufacturing International Corp
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE DEVICE AND EXPOSURE METHOD
Publication number
20140063480
Publication date
Mar 6, 2014
SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
Qiang WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY MACHINE AND SCANNING AND EXPOSING METHOD THEREOF
Publication number
20130169946
Publication date
Jul 4, 2013
SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
Qiang WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY