Tianming CHEN

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Patents Grantslast 30 patents

Information Patent Grant
System for inspecting and grounding a mask in a charged particle sy...
- Patent number 12,142,451
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Tianming Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DUAL FOCUS SOLUTON FOR SEM METROLOGY TOOLS
- Publication number 20240071713
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Niels Johannes Maria BOSCH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR INSPECTING AND GROUNDING A MASK IN A CHARGED PARTICLE SY...
- Publication number 20230005698
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Tianming CHEN
- H01 - BASIC ELECTRIC ELEMENTS