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Patents Grantslast 30 patents

Information Patent Grant
Proximity sensor, lithographic apparatus and device manufacturing m...
- Patent number 10,551,182
- Issue date Feb 4, 2020
- ASML Netherlands B.V.
- Tiannan Guan
- G01 - MEASURING TESTING
Information Patent Grant
Measurement substrate, a measurement method and a measurement system
- Patent number 10,451,981
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Tiannan Guan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table and lithographic apparatus
- Patent number 10,192,772
- Issue date Jan 29, 2019
- ASML Netherlands B.V.
- Satish Achanta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CLAMP ASSEMBLY
- Publication number 20230008915
- Publication date Jan 12, 2023
- ASML NETHERLANDS B.V.
- Ronald Van Der Wilk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TOOL FOR MODIFYING A SUPPORT SURFACE
- Publication number 20210263418
- Publication date Aug 26, 2021
- ASML NETHERLANDS B.V.
- Bert Dirk SCHOLTEN
- B24 - GRINDING POLISHING
Information Patent Application
A SYSTEM FOR CLEANING A SUBSTRATE SUPPORT, A METHOD OF REMOVING MAT...
- Publication number 20200103770
- Publication date Apr 2, 2020
- ASML NETHERLANDS B.V.
- Tiannan GUAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A MEASUREMENT SUBSTRATE, A MEASUREMENT METHOD AND A MEASUREMENT SYSTEM
- Publication number 20190243257
- Publication date Aug 8, 2019
- ASML NETHERLANDS B.V.
- Tiannan GUAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROXIMITY SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20190086202
- Publication date Mar 21, 2019
- ASML NETHERLANDS B.V.
- Tiannan GUAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE AND LITHOGRAPHIC APPARATUS
- Publication number 20180308740
- Publication date Oct 25, 2018
- ASML NETHERLANDS B.V.
- Satish ACHANTA
- H01 - BASIC ELECTRIC ELEMENTS