Tianniu Chen

Person

Westford, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon implantation in substrates and provision of silicon precurs...
- Patent number 11,062,906
- Issue date Jul 13, 2021
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching solution for tungsten and GST films
- Patent number 11,035,044
- Issue date Jun 15, 2021
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiN hard mask and etch residue removal
- Patent number 10,711,227
- Issue date Jul 14, 2020
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching compositions and methods for using same
- Patent number 10,400,167
- Issue date Sep 3, 2019
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selectively removing titanium nitride hard mask and etch residue re...
- Patent number 10,332,784
- Issue date Jun 25, 2019
- VERSUM MATERIALS US, LLC
- William Jack Casteel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stripping compositions having high WN/W etching selectivity
- Patent number 10,301,580
- Issue date May 28, 2019
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist cleaning composition used in photolithography and a met...
- Patent number 10,072,237
- Issue date Sep 11, 2018
- VERSUM MATERIALS US, LLC
- Randy Li-Kai Chang
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
TiN hard mask and etch residual removal
- Patent number 9,976,111
- Issue date May 22, 2018
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Composition for treating surface of substrate, method and device
- Patent number 9,976,037
- Issue date May 22, 2018
- VERSUM MATERIALS US, LLC
- Seiji Inaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etchant solutions and method of use thereof
- Patent number 9,873,833
- Issue date Jan 23, 2018
- VERSUM MATERIALS US, LLC
- Gene Everad Parris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition and process for selectively etching metal nitrides
- Patent number 9,831,088
- Issue date Nov 28, 2017
- Entegris, Inc.
- Tianniu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composition and method for low temperature chemical vapor depositio...
- Patent number 9,783,558
- Issue date Oct 10, 2017
- Entegris, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Apparatus and method for stripping solder metals during the recycli...
- Patent number 9,731,368
- Issue date Aug 15, 2017
- Entegris, Inc.
- Tianniu Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for stripping solder metals during the recycli...
- Patent number 9,649,712
- Issue date May 16, 2017
- Entegris, Inc.
- Tianniu Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Precursor compositions for atomic layer deposition and chemical vap...
- Patent number 9,534,285
- Issue date Jan 3, 2017
- Entegris, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tellurium compounds useful for deposition of tellurium containing m...
- Patent number 9,537,095
- Issue date Jan 3, 2017
- Entegris, Inc.
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition for titanium nitride hard mask and etch residue removal
- Patent number 9,472,420
- Issue date Oct 18, 2016
- Air Products and Chemicals, Inc.
- William Jack Casteel
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Titanium nitride hard mask and etch residue removal
- Patent number 9,222,018
- Issue date Dec 29, 2015
- Air Products and Chemicals, Inc.
- William Jack Casteel
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Apparatus and method for stripping solder metals during the recycli...
- Patent number 9,221,114
- Issue date Dec 29, 2015
- Advanced Technology Materials, Inc.
- Tianniu Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 9,219,232
- Issue date Dec 22, 2015
- Entegris, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and method for low temperature chemical vapor depositio...
- Patent number 9,102,693
- Issue date Aug 11, 2015
- Entegris, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Lithographic tool in situ clean formulations
- Patent number 9,074,169
- Issue date Jul 7, 2015
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Antimony compounds useful for deposition of antimony-containing mat...
- Patent number 9,034,688
- Issue date May 19, 2015
- Entegris, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of phase change memory materials
- Patent number 8,877,549
- Issue date Nov 4, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition and method for low temperature chemical vapor depositio...
- Patent number 8,802,882
- Issue date Aug 12, 2014
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Tellurium compounds useful for deposition of tellurium containing m...
- Patent number 8,796,068
- Issue date Aug 5, 2014
- Advanced Technology Materials, Inc.
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor compositions for atomic layer deposition and chemical vap...
- Patent number 8,784,936
- Issue date Jul 22, 2014
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony and germanium complexes useful for CVD/ALD of metal thin f...
- Patent number 8,709,863
- Issue date Apr 29, 2014
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of phase change memory materials
- Patent number 8,679,894
- Issue date Mar 25, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antimony compounds useful for deposition of antimony-containing mat...
- Patent number 8,674,127
- Issue date Mar 18, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITIONS FOR REMOVING ETCH RESIDUES, METHODS OF USING AND USE T...
- Publication number 20220251480
- Publication date Aug 11, 2022
- VERSUM MATERIALS US, LLC
- Laisheng Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TiN Hard Mask and Etch Residue Removal
- Publication number 20180251711
- Publication date Sep 6, 2018
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Solution For Tungsten And GST Films
- Publication number 20180209049
- Publication date Jul 26, 2018
- VERSUM MATERIALS US, LLC
- Wen Dar Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Etching Compositions and Methods for Using Same
- Publication number 20170145311
- Publication date May 25, 2017
- Air Products and Chemicals, Inc.
- Wen Dar Liu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
TiN Hard Mask And Etch Residual Removal
- Publication number 20170107460
- Publication date Apr 20, 2017
- Air Products and Chemicals, Inc.
- Wen Dar Liu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Photoresist Cleaning Composition Used in Photolithography and a Met...
- Publication number 20170037344
- Publication date Feb 9, 2017
- Air Products and Chemicals, Inc.
- Randy Li-Kai Chang
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
WET BASED FORMULATIONS FOR THE SELECTIVE REMOVAL OF NOBLE METALS
- Publication number 20160362804
- Publication date Dec 15, 2016
- Entegris, Inc.
- Tianniu Chen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Composition for Treating Surface of Substrate, Method and Device
- Publication number 20160289455
- Publication date Oct 6, 2016
- Air Products and Chemicals, Inc.
- Seiji Inaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Selectively Removing Titanium Nitride Hard Mask and Etch Residue Re...
- Publication number 20160293479
- Publication date Oct 6, 2016
- Air Products and Chemicals, Inc.
- William Jack Casteel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURS...
- Publication number 20160211137
- Publication date Jul 21, 2016
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stripping Compositions Having High WN/W Etching Selectivity
- Publication number 20160186105
- Publication date Jun 30, 2016
- Air Products and Chemicals, Inc.
- Wen Dar Liu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Etchant Solutions and Method of Use Thereof
- Publication number 20160186058
- Publication date Jun 30, 2016
- Air Products and Chemicals, Inc.
- Gene Everad Parris
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
APPARATUS AND METHOD FOR STRIPPING SOLDER METALS DURING THE RECYCLI...
- Publication number 20150322545
- Publication date Nov 12, 2015
- Advanced Technology Materials, Inc.
- Tianniu CHEN
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR STRIPPING SOLDER METALS DURING THE RECYCLI...
- Publication number 20150321279
- Publication date Nov 12, 2015
- Advanced Technology Materials, Inc.
- Tianniu CHEN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR STRIPPING SOLDER METALS DURING THE RECYCLI...
- Publication number 20150322540
- Publication date Nov 12, 2015
- Advanced Technology Materials, Inc.
- Tianniu CHEN
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...
- Publication number 20150315215
- Publication date Nov 5, 2015
- Entegris, Inc.
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Composition for Titanium Nitride Hard Mask and Etch Residue Removal
- Publication number 20150175943
- Publication date Jun 25, 2015
- Air Products and Chemicals, Inc.
- William Jack Casteel
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION
- Publication number 20150162213
- Publication date Jun 11, 2015
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVAL OF LEAD FROM SOLID MATERIALS
- Publication number 20150050199
- Publication date Feb 19, 2015
- Entegris, Inc.
- Michael B. Korzenski
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...
- Publication number 20140329357
- Publication date Nov 6, 2014
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...
- Publication number 20140329011
- Publication date Nov 6, 2014
- Ziyun Wang
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAP...
- Publication number 20140295071
- Publication date Oct 2, 2014
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...
- Publication number 20140220733
- Publication date Aug 7, 2014
- Advanced Technology Materials, Inc.
- William Hunks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
- Publication number 20140206134
- Publication date Jul 24, 2014
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...
- Publication number 20140206136
- Publication date Jul 24, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR STRIPPING SOLDER METALS DURING THE RECYCLI...
- Publication number 20140191019
- Publication date Jul 10, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COMPOSITION AND PROCESS FOR SELECTIVELY ETCHING METAL NITRIDES
- Publication number 20140038420
- Publication date Feb 6, 2014
- Advanced Technology Materials, Inc.
- Tianniu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF TEXTURING SURFACES FOR CONTROLLED REFLECTION
- Publication number 20130295712
- Publication date Nov 7, 2013
- Advanced Technology Materials, Inc.
- Tianniu CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...
- Publication number 20130288462
- Publication date Oct 31, 2013
- Matthias Stender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREVENTING THE COLLAPSE OF HIGH ASPECT RATIO STRUCTURES...
- Publication number 20130280123
- Publication date Oct 24, 2013
- Advanced Technology Materials, Inc.
- Tianniu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Tianniu Chen

Person

Patents Grantslast 30 patents

Silicon implantation in substrates and provision of silicon precurs...

Etching solution for tungsten and GST films

TiN hard mask and etch residue removal

Etching compositions and methods for using same

Selectively removing titanium nitride hard mask and etch residue re...

Stripping compositions having high WN/W etching selectivity

Photoresist cleaning composition used in photolithography and a met...

TiN hard mask and etch residual removal

Composition for treating surface of substrate, method and device

Etchant solutions and method of use thereof

Composition and process for selectively etching metal nitrides

Composition and method for low temperature chemical vapor depositio...

Apparatus and method for stripping solder metals during the recycli...

Apparatus and method for stripping solder metals during the recycli...

Precursor compositions for atomic layer deposition and chemical vap...

Tellurium compounds useful for deposition of tellurium containing m...

Composition for titanium nitride hard mask and etch residue removal

Titanium nitride hard mask and etch residue removal

Apparatus and method for stripping solder metals during the recycli...

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Composition and method for low temperature chemical vapor depositio...

Lithographic tool in situ clean formulations

Antimony compounds useful for deposition of antimony-containing mat...

Low temperature deposition of phase change memory materials

Composition and method for low temperature chemical vapor depositio...

Tellurium compounds useful for deposition of tellurium containing m...

Precursor compositions for atomic layer deposition and chemical vap...

Antimony and germanium complexes useful for CVD/ALD of metal thin f...

Low temperature deposition of phase change memory materials

Antimony compounds useful for deposition of antimony-containing mat...

Patents Applicationslast 30 patents

COMPOSITIONS FOR REMOVING ETCH RESIDUES, METHODS OF USING AND USE T...

TiN Hard Mask and Etch Residue Removal

Etching Solution For Tungsten And GST Films

Etching Compositions and Methods for Using Same

TiN Hard Mask And Etch Residual Removal

Photoresist Cleaning Composition Used in Photolithography and a Met...

WET BASED FORMULATIONS FOR THE SELECTIVE REMOVAL OF NOBLE METALS

Composition for Treating Surface of Substrate, Method and Device

Selectively Removing Titanium Nitride Hard Mask and Etch Residue Re...

SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURS...

Stripping Compositions Having High WN/W Etching Selectivity

Etchant Solutions and Method of Use Thereof

APPARATUS AND METHOD FOR STRIPPING SOLDER METALS DURING THE RECYCLI...

APPARATUS AND METHOD FOR STRIPPING SOLDER METALS DURING THE RECYCLI...

APPARATUS AND METHOD FOR STRIPPING SOLDER METALS DURING THE RECYCLI...

COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...

Composition for Titanium Nitride Hard Mask and Etch Residue Removal

FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION

REMOVAL OF LEAD FROM SOLID MATERIALS

TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...

COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...

PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAP...

ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN F...

LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS

ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MAT...

APPARATUS AND METHOD FOR STRIPPING SOLDER METALS DURING THE RECYCLI...

COMPOSITION AND PROCESS FOR SELECTIVELY ETCHING METAL NITRIDES

METHODS OF TEXTURING SURFACES FOR CONTROLLED REFLECTION

TELLURIUM COMPOUNDS USEFUL FOR DEPOSITION OF TELLURIUM CONTAINING M...

METHOD FOR PREVENTING THE COLLAPSE OF HIGH ASPECT RATIO STRUCTURES...