Tianyu YANG

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Polishing pad cleaning with vacuum apparatus
- Patent number 9,498,866
- Issue date Nov 22, 2016
- Applied Materials, Inc.
- Christopher Heung-Gyun Lee
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING PAD CLEANING WITH VACUUM APPARATUS
- Publication number 20140273763
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Christopher Heung-Gyun LEE
- B24 - GRINDING POLISHING