Tiharu Kato

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Kitakami, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming micro patterns
- Patent number 4,988,609
- Issue date Jan 29, 1991
- Kabushiki Kaisha Toshiba
- Hidetsuna Hashimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positive resist quaternary ammonium hydroxide containing developer...
- Patent number 4,914,006
- Issue date Apr 3, 1990
- Kabushiki Kaisha Toshiba
- Tiharu Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a semiconductor device involving sidewall s...
- Patent number 4,792,534
- Issue date Dec 20, 1988
- Kabushiki Kaisha Toshiba
- Hitoshi Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Negative-working photoresist coating composition
- Patent number 4,525,523
- Issue date Jun 25, 1985
- Kanto Chemical Co., Inc.
- Hatsuo Nakamura
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method for forming resist pattern
- Patent number 4,461,825
- Issue date Jul 24, 1984
- Tokyo Shibaura Denki Kabushiki Kaisha
- Tiharu Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY