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Tijs Frans TEEPEN
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TILBURG, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithography system, sensor and measuring method
Patent number
RE49602
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Pieter Kruit
Information
Patent Grant
Lithography system, sensor and measuring method
Patent number
RE48046
Issue date
Jun 9, 2020
ASML Netherlands B.V.
Pieter Kruit
Information
Patent Grant
Lithography system, sensor and measuring method
Patent number
RE45206
Issue date
Oct 28, 2014
Mapper Lithography IP B.V.
Pieter Kruit
250 - Radiant energy
Information
Patent Grant
Charged particle lithography apparatus and method of generating vac...
Patent number
8,690,005
Issue date
Apr 8, 2014
Mapper Lithography IP B.V.
Sander Baltussen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography system, sensor and measuring method
Patent number
7,868,300
Issue date
Jan 11, 2011
Mapper Lithography IP B.V.
Pieter Kruit
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VAC...
Publication number
20110042579
Publication date
Feb 24, 2011
MAPPER LITHOGRAPHY IP BV
Guido DE BOER
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VAC...
Publication number
20100270299
Publication date
Oct 28, 2010
MAPPER LITHOGRAPHY IP BV
Sander BALTUSSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithography system, sensor and measuring method
Publication number
20070057204
Publication date
Mar 15, 2007
Pieter Kruit
B82 - NANO-TECHNOLOGY