Till Windischbauer

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Patents Grantslast 30 patents

Information Patent Grant
Maskless particle-beam system for exposing a pattern on a substrate
- Patent number 6,768,125
- Issue date Jul 27, 2004
- IMS Nanofabrication, GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Maskless particle-beam system for exposing a pattern on a substrate
- Publication number 20030155534
- Publication date Aug 21, 2003
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY