Tillmann Ehrenberg

Person

Schoeffengrund, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining positions of structures on a substrate
- Patent number 7,948,635
- Issue date May 24, 2011
- Vistec Semiconductor Systems GmbH
- Katrin Pietsch
- G01 - MEASURING TESTING
Information Patent Grant
Device for measuring or inspecting substrates of the semiconductor...
- Patent number 7,906,978
- Issue date Mar 15, 2011
- Vistec Semiconductor Systems GmbH
- Tillmann Ehrenberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for measuring the position of at least one structure on a su...
- Patent number 7,872,763
- Issue date Jan 18, 2011
- Vistec Semiconductor Systems GmbH
- Katrin Pietsch
- G01 - MEASURING TESTING
Information Patent Grant
Device for measuring positions of structures on a substrate
- Patent number 7,817,262
- Issue date Oct 19, 2010
- Vistec Semiconductor Systems GmbH
- Tillmann Ehrenberg
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Device for measuring or inspecting substrates of the semiconductor...
- Publication number 20090189157
- Publication date Jul 30, 2009
- Vistec Semiconductor Systems GmbH
- Tillmann Ehrenberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for supporting a substrate at a position with...
- Publication number 20090126525
- Publication date May 21, 2009
- Vistec Semiconductor Systems GmbH
- Katrin Pietsch
- G01 - MEASURING TESTING
Information Patent Application
Device for measuring the position of at least one structure on a su...
- Publication number 20090128828
- Publication date May 21, 2009
- Vistec Semiconductor Systems GmbH
- Katrin Pietsch
- G01 - MEASURING TESTING
Information Patent Application
Method for determining positions of structures on a substrate
- Publication number 20090109443
- Publication date Apr 30, 2009
- Vistec Semiconductor Systems GmbH
- Katrin Pietsch
- G01 - MEASURING TESTING
Information Patent Application
Advancing means for a multi-coordinate measurement table of a coord...
- Publication number 20090013808
- Publication date Jan 15, 2009
- Vistec Semiconductor Systems GmbH
- Tillmann Ehrenberg
- G01 - MEASURING TESTING
Information Patent Application
Device for measuring positions of structures on a substrate
- Publication number 20090002720
- Publication date Jan 1, 2009
- Vistec Semiconductor Systems GmbH
- Tillmann Ehrenberg
- G01 - MEASURING TESTING

Tillmann Ehrenberg

Person

Patents Grantslast 30 patents

Method for determining positions of structures on a substrate

Device for measuring or inspecting substrates of the semiconductor...

Device for measuring the position of at least one structure on a su...

Device for measuring positions of structures on a substrate

Patents Applicationslast 30 patents

Device for measuring or inspecting substrates of the semiconductor...

Apparatus and method for supporting a substrate at a position with...

Device for measuring the position of at least one structure on a su...

Method for determining positions of structures on a substrate

Advancing means for a multi-coordinate measurement table of a coord...

Device for measuring positions of structures on a substrate