Tilmann Heil

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical correction device
- Patent number 8,325,322
- Issue date Dec 4, 2012
- Carl Zeiss SMT GmbH
- Markus Hauf
- G02 - OPTICS
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 7,999,916
- Issue date Aug 16, 2011
- Carl Zeiss SMT GmbH
- Tilmann Heil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarized radiation in lithographic apparatus and device manufactur...
- Patent number 7,929,116
- Issue date Apr 19, 2011
- ASML Netherlands B.V.
- Christian Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and projection exposure apparatus for mi...
- Patent number 7,800,732
- Issue date Sep 21, 2010
- Carl Zeiss SMT AG
- Joerg Zimmermann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarized radiation in lithographic apparatus and device manufactur...
- Patent number 7,345,740
- Issue date Mar 18, 2008
- ASML Netherlands B.V.
- Christian Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarized radiation in lithographic apparatus and device manufactur...
- Patent number 7,312,852
- Issue date Dec 25, 2007
- ASML Netherlands B.V.
- Christian Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL CORRECTION DEVICE
- Publication number 20100201958
- Publication date Aug 12, 2010
- Carl Zeiss SMT AG
- Markus Hauf
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
- Publication number 20100157266
- Publication date Jun 24, 2010
- Carl Zeiss SMT AG
- Joerg Zimmermann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20080204875
- Publication date Aug 28, 2008
- Carl Zeiss SMT AG
- Tilmann Heil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Polarized radiation in lithographic apparatus and device manufactur...
- Publication number 20080143992
- Publication date Jun 19, 2008
- ASML NETHERLANDS B.V.
- Christian Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Polarized radiation in lithographic apparatus and device manufactur...
- Publication number 20060139611
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Christian Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Polarized radiation in lithographic apparatus and device manufactur...
- Publication number 20060139612
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Christian Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tilmann Heil

Person

Patents Grantslast 30 patents

Optical correction device

Microlithographic projection exposure apparatus

Polarized radiation in lithographic apparatus and device manufactur...

Projection exposure method and projection exposure apparatus for mi...

Polarized radiation in lithographic apparatus and device manufactur...

Polarized radiation in lithographic apparatus and device manufactur...

Patents Applicationslast 30 patents

OPTICAL CORRECTION DEVICE

PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Polarized radiation in lithographic apparatus and device manufactur...

Polarized radiation in lithographic apparatus and device manufactur...

Polarized radiation in lithographic apparatus and device manufactur...