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Tim Provencher
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Gilbert, AZ, US
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last 30 patents
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Patent Grant
High temperature ALD inlet manifold
Patent number
8,372,201
Issue date
Feb 12, 2013
ASM America, Inc.
Timothy J. Provencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High temperature ALD inlet manifold
Patent number
7,918,938
Issue date
Apr 5, 2011
ASM America, Inc.
Timothy J. Provencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particulate reduction using temperature-controlled chamber shield
Patent number
7,182,816
Issue date
Feb 27, 2007
Tokyo Electron Limited
Mark Kleshock
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
HIGH TEMPERATURE ALD INLET MANIFOLD
Publication number
20110162580
Publication date
Jul 7, 2011
ASM AMERICA, INC
Timothy J. Provencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
High temperature ALD inlet manifold
Publication number
20080202416
Publication date
Aug 28, 2008
Timothy J. Provencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SAFETY FEATURES FOR SEMICONDUCTOR PROCESSING APPARATUS USING PYROPH...
Publication number
20080032502
Publication date
Feb 7, 2008
ASM AMERICA, INC
Charles A. Baskin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Particulate reduction using temperature-controlled chamber shield
Publication number
20050039679
Publication date
Feb 24, 2005
TOKYO ELECTRON LIMITED
Mark Kleshock
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cooled deposition baffle in high density plasma semiconductor proce...
Publication number
20040129221
Publication date
Jul 8, 2004
Jozef Brcka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...