Tim Rathje

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Image sensor for immersion lithography
- Patent number 11,774,868
- Issue date Oct 3, 2023
- ASML Netherlands B.V.
- Nirupam Banerjee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for the fast phase evaluation, in particular of m...
- Patent number 9,194,753
- Issue date Nov 24, 2015
- Femtolasers Produktions GmbH
- Gerhard Georg Paulus
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IMAGE SENSOR FOR IMMERSION LITHOGRAPHY
- Publication number 20220163896
- Publication date May 26, 2022
- ASML NETHERLANDS B.V.
- Nirupam BANERJEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR THE FAST PHASE EVALUATION, IN PARTICULAR OF M...
- Publication number 20140023099
- Publication date Jan 23, 2014
- Gerhard Georg Paulus
- G01 - MEASURING TESTING