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Tim S. Wihl
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Coordinate fusion and thickness calibration for semiconductor wafer...
Patent number
8,629,902
Issue date
Jan 14, 2014
KLA-Tencor Corporation
Isabella T. Lewis
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for multi-dimensional metrology and/or inspecti...
Patent number
7,126,699
Issue date
Oct 24, 2006
KLA-Tencor Technologies Corp.
Tim Wihl
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for multi-dimensional inspection and/or metrolo...
Patent number
6,917,421
Issue date
Jul 12, 2005
KLA-Tencor Technologies Corp.
Tim Wihl
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
COORDINATE FUSION AND THICKNESS CALIBRATION FOR SEMICONDUCTOR WAFER...
Publication number
20120086796
Publication date
Apr 12, 2012
KLA-Tencor Corporation
Isabella T. Lewis
G06 - COMPUTING CALCULATING COUNTING