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Tim S. Wihl
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San Jose, CA, US
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last 30 patents
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Patent Grant
Automatic photomask and reticle inspection method and apparatus inc...
Patent number
4,805,123
Issue date
Feb 14, 1989
KLA Instruments Corporation
Donald F. Specht
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Process and apparatus for in-situ qualification of master patterns...
Patent number
4,758,094
Issue date
Jul 19, 1988
KLA Instruments Corp.
Tim S. Wihl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask inspection apparatus and method using corner comparator d...
Patent number
4,532,650
Issue date
Jul 30, 1985
KLA Instruments Corporation
Tim S. Wihl
G06 - COMPUTING CALCULATING COUNTING