Timo VÄHÄ-OJALA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,325,915
- Issue date Jun 10, 2025
- Picosun Oy
- Timo Vähä-Ojala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid distributing device for a thin-film deposition apparatus, rel...
- Patent number 10,982,325
- Issue date Apr 20, 2021
- Picosun Oy
- Juhana Kostamo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20220403514
- Publication date Dec 22, 2022
- Picosun Oy
- Timo VÄHÄ-OJALA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...
- Publication number 20210087682
- Publication date Mar 25, 2021
- Picosun Oy
- Juhana KOSTAMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...