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Reticle capturing and handling system
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Patent number 6,515,736
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Issue date Feb 4, 2003
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International Business Machines Corporation
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Dennis M. Hayden
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Reticle SMIF pod in situ orientation
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Patent number 6,338,409
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Issue date Jan 15, 2002
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International Business Machines Corporation
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Timothy E. Neary
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Methods for repair of photomasks
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Patent number 6,190,836
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Issue date Feb 20, 2001
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International Business Machines Corporation
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Brian J. Grenon
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Methods for repair of photomasks
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Patent number 6,165,649
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Issue date Dec 26, 2000
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International Business Machines Corporation
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Brian J. Grenon
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Method for repair of photomasks
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Patent number 6,156,461
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Issue date Dec 5, 2000
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International Business Machines Corporation
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Brian J. Grenon
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Multiple polarity mask exposure method
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Patent number 6,110,624
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Issue date Aug 29, 2000
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International Business Machines Corporation
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Michael S. Hibbs
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Methods for repair of photomasks
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Patent number 6,090,507
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Issue date Jul 18, 2000
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International Business Machines Corporation
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Brian J. Grenon
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Method for repairing photomasks
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Patent number 5,981,110
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Issue date Nov 9, 1999
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International Business Machines Corporation
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Merrilou George
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Fib repair method
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Patent number 5,882,823
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Issue date Mar 16, 1999
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International Business Machines Corporation
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Timothy Edward Neary
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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