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Timothy Groves
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Cambridge, GB
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last 30 patents
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Patent Grant
Dual-mode electron beam lithography machine
Patent number
7,053,388
Issue date
May 30, 2006
Leica Microsystems Lithography Ltd.
Nigel Crosland
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Dual-mode electron beam lithography machine
Publication number
20050045836
Publication date
Mar 3, 2005
Leica Microsystems Lithography Ltd.
Nigel Crosland
B82 - NANO-TECHNOLOGY
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Patent Application
Pattern writing equipment
Publication number
20050035308
Publication date
Feb 17, 2005
Leica Microsystems Lithography Ltd.
Amin Javer
B82 - NANO-TECHNOLOGY