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Timothy M. Hughes
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Marlboro, NY, US
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last 30 patents
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Patent Grant
Underlayer compositions for multilayer lithographic processes
Patent number
6,927,015
Issue date
Aug 9, 2005
International Business Machines Corporation
Mahmoud M. Khojasteh
G11 - INFORMATION STORAGE
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Patent Grant
Underlayer compositions for multilayer lithographic processes
Patent number
6,818,381
Issue date
Nov 16, 2004
International Business Machines Corporation
Mahmoud M. Khojasteh
G11 - INFORMATION STORAGE
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Patent Grant
Resist composition and process of forming a patterned resist layer...
Patent number
6,210,856
Issue date
Apr 3, 2001
International Business Machines Corporation
Qinghuang Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Underlayer compositions for multilayer lithographic processes
Publication number
20050019704
Publication date
Jan 27, 2005
Mahmoud M. Khojasteh
G11 - INFORMATION STORAGE
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Patent Application
High resolution photoresist compositions
Publication number
20030003391
Publication date
Jan 2, 2003
Shipley Company, L.L.C.
George G. Barclay
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Underlayer compositions for multilayer lithographic processes
Publication number
20020058204
Publication date
May 16, 2002
International Business Machines Corporation
Mahmoud M. Khojasteh
G11 - INFORMATION STORAGE