Timothy R. Groves

Person

Fulbourn, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Calibration target for electron beams
- Patent number 6,369,396
- Issue date Apr 9, 2002
- International Business Machines Corporation
- John G. Hartley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for writing a pattern using multiple variable shaped electro...
- Patent number 6,175,122
- Issue date Jan 16, 2001
- International Business Machines Corporation
- Timothy R. Groves
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Distributed direct write lithography system using multiple variable...
- Patent number 5,981,962
- Issue date Nov 9, 1999
- International Business Machines Corporation
- Timothy R. Groves
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multiple variable shaped electron beam system with lithographic str...
- Patent number 5,962,859
- Issue date Oct 5, 1999
- International Business Machines Corporation
- Timothy R. Groves
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Emulation methodology for critical dimension control in E-Beam lith...
- Patent number 5,916,716
- Issue date Jun 29, 1999
- International Business Machines Corporation
- Rainer Butsch
- B82 - NANO-TECHNOLOGY
Information Patent Grant
High accuracy fabrication of X-ray masks with optical and E-beam li...
- Patent number 5,756,234
- Issue date May 26, 1998
- International Business Machines Corporation
- Timothy R. Groves
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam nano-metrology system
- Patent number 5,585,629
- Issue date Dec 17, 1996
- International Business Machines Corporation
- Samuel K. Doran
- G01 - MEASURING TESTING
Information Patent Grant
Telecentric sub-field deflection with vail
- Patent number 4,859,856
- Issue date Aug 22, 1989
- International Business Machines Corporation
- Timothy R. Groves
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive coated semiconductor electrostatic deflection plates
- Patent number 4,737,644
- Issue date Apr 12, 1988
- International Business Machines Corporation
- Douglas G. Cullum
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS

Patents Applicationslast 30 patents

Information Patent Application
Spatial phase locking with shaped electron beam lithography
- Publication number 20020130274
- Publication date Sep 19, 2002
- International Busines Machines Corporation
- Juan Ferrera
- B82 - NANO-TECHNOLOGY

Timothy R. Groves

Person

Patents Grantslast 30 patents

Calibration target for electron beams

Method for writing a pattern using multiple variable shaped electro...

Distributed direct write lithography system using multiple variable...

Multiple variable shaped electron beam system with lithographic str...

Emulation methodology for critical dimension control in E-Beam lith...

High accuracy fabrication of X-ray masks with optical and E-beam li...

Electron beam nano-metrology system

Telecentric sub-field deflection with vail

Conductive coated semiconductor electrostatic deflection plates

Patents Applicationslast 30 patents

Spatial phase locking with shaped electron beam lithography