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Timothy Scott Chamberlin
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Fairfax, VT, US
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last 30 patents
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Patent Grant
Slurry injection technique for chemical-mechanical polishing
Patent number
5,997,392
Issue date
Dec 7, 1999
International Business Machines Corporation
Timothy S. Chamberlin
B24 - GRINDING POLISHING
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Patent Grant
Polish pad conditioner with radial compensation
Patent number
5,785,585
Issue date
Jul 28, 1998
International Business Machines Corporation
Paul Anthony Manfredi
B24 - GRINDING POLISHING