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San Jose, CA, US
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last 30 patents
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Patent Grant
Feedforward temperature control for plasma processing apparatus
Patent number
9,338,871
Issue date
May 10, 2016
Applied Materials, Inc.
Chetan Mahadeswaraswamy
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
9,214,315
Issue date
Dec 15, 2015
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
8,916,793
Issue date
Dec 23, 2014
Applied Materials, Inc.
Fernando M. Silveira
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20160155612
Publication date
Jun 2, 2016
Chetan MAHADESWARASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20150316941
Publication date
Nov 5, 2015
Applied Materials, Inc.
Fernando M. SILVEIRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20120132397
Publication date
May 31, 2012
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20110186545
Publication date
Aug 4, 2011
Applied Materials, Inc.
Chetan MAHADESWARASWAMY
G05 - CONTROLLING REGULATING