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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for the treatment of workpieces
Patent number
11,791,181
Issue date
Oct 17, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective etch process using hydrofluoric acid and ozone gases
Patent number
11,791,166
Issue date
Oct 17, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Qi Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface pretreatment process to improve quality of oxide films prod...
Patent number
11,495,437
Issue date
Nov 8, 2022
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ozone for selective hydrophilic surface treatment
Patent number
11,495,456
Issue date
Nov 8, 2022
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Ting Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective etch process using hydrofluoric acid and ozone gases
Patent number
11,183,397
Issue date
Nov 23, 2021
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Qi Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing of workpieces using hydrogen radicals and ozone gas
Patent number
11,164,727
Issue date
Nov 2, 2021
Beijing E-Town Semiconductor Technology Co., Ltd.
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ozone treatment for selective silicon nitride etch over silicon
Patent number
11,043,393
Issue date
Jun 22, 2021
Mattson Technology, Inc.
Shanyu Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integration of materials removal and surface treatment in semicondu...
Patent number
10,964,528
Issue date
Mar 30, 2021
Mattson Technology, Inc.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing a workpiece
Patent number
10,950,428
Issue date
Mar 16, 2021
Mattson Technology, Inc.
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integration of materials removal and surface treatment in semicondu...
Patent number
10,403,492
Issue date
Sep 3, 2019
Mattson Technology, Inc.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Workpiece Processing Apparatus and Methods for the Treatment of Wor...
Publication number
20240404797
Publication date
Dec 5, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF PROCESSING WORKPIECES USING ORGANIC RADICALS
Publication number
20240165659
Publication date
May 23, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Ting Xie
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
Publication number
20220084839
Publication date
Mar 17, 2022
Mattson Technology, Inc.
Qi Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods And Apparatus For Pulsed Inductively Coupled Plasma For Sur...
Publication number
20210343506
Publication date
Nov 4, 2021
Mattson Technology, Inc.
Ting Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
Publication number
20210118694
Publication date
Apr 22, 2021
Mattson Technology, Inc.
Qi Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR THE TREATMENT OF WORKPIECES
Publication number
20210082724
Publication date
Mar 18, 2021
Mattson Technology, Inc.
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Processing a Workpiece
Publication number
20210066074
Publication date
Mar 4, 2021
Mattson Technology, Inc.
Ting Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING OF WORKPIECES USING HYDROGEN RADICALS AND OZONE GAS
Publication number
20210020413
Publication date
Jan 21, 2021
Mattson Technology, Inc.
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Surface Pretreatment Process To Improve Quality Of Oxide Films Prod...
Publication number
20200373129
Publication date
Nov 26, 2020
Mattson Technology, Inc.
Ting Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ozone Treatment for Selective Silicon Nitride Etch Over Silicon
Publication number
20200234969
Publication date
Jul 23, 2020
Mattson Technology, Inc.
Shanyu Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integration Of Materials Removal And Surface Treatment In Semicondu...
Publication number
20200185216
Publication date
Jun 11, 2020
Mattson Technology, Inc.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ozone for Selective Hydrophilic Surface Treatment
Publication number
20200118813
Publication date
Apr 16, 2020
Mattson Technology, Inc.
Ting Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...