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Tjarko Adriaan Rudolf VAN EMPEL
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus with flexible transportation line having var...
Patent number
9,766,558
Issue date
Sep 19, 2017
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electrostatic clamp
Patent number
9,455,172
Issue date
Sep 27, 2016
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Module and method for producing extreme ultraviolet radiation
Patent number
9,363,879
Issue date
Jun 7, 2016
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and system for thermally conditioning an optical element
Patent number
9,176,398
Issue date
Nov 3, 2015
ASML Netherlands B.V.
Roger Wilhelmus Antonius Henricus Schmitz
G02 - OPTICS
Information
Patent Grant
Module and method for producing extreme ultraviolet radiation
Patent number
8,901,521
Issue date
Dec 2, 2014
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,749,756
Issue date
Jun 10, 2014
ASML Netherlands B.V.
Yuri Johannes Gabrial Van De Vijver
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and system for determining a suppression factor of a suppres...
Patent number
8,711,325
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dichroic mirror, method for manufacturing a dichroic mirror, lithog...
Patent number
8,451,429
Issue date
May 28, 2013
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Assembly comprising a conditioning system and at least one object,...
Patent number
8,441,610
Issue date
May 14, 2013
ASML Netherlands B.V.
Ronald Van Der Ham
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,707,530
Issue date
Mar 16, 2004
ASML Netherlands B.V.
Raymond Laurentius Johannes Schrijver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Purge gas systems for use in lithographic projection apparatus
Patent number
6,542,220
Issue date
Apr 1, 2003
ASML Netherlands, B.V.
Raymond L. J. Schrijver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask clamping apparatus, e.g. for a lithographic apparatus
Patent number
6,480,260
Issue date
Nov 12, 2002
ASML Netherlands B.V.
Sjoerd N. L. Donders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus
Patent number
6,413,701
Issue date
Jul 2, 2002
ASML Netherlands B.V.
Tjarko A. R. van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus with improved substrate holder
Patent number
6,232,615
Issue date
May 15, 2001
ASM Lithography B.V.
Tjarko Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
Publication number
20150077729
Publication date
Mar 19, 2015
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf VAN EMPEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROSTATIC CLAMP
Publication number
20150036258
Publication date
Feb 5, 2015
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Assembly comprising a conditioning system and at least one object,...
Publication number
20070222906
Publication date
Sep 27, 2007
ASML NETHERLANDS B.V.
Ronald Van Der Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method incorporatio...
Publication number
20070146656
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method for manufacturing a device
Publication number
20070139629
Publication date
Jun 21, 2007
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus temperature compensation
Publication number
20070076218
Publication date
Apr 5, 2007
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method for conditioning an interior spac...
Publication number
20070071889
Publication date
Mar 29, 2007
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Using unflatness information of the substrate table or mask table f...
Publication number
20060114436
Publication date
Jun 1, 2006
ASML NETHERLANDS B.V.
Rene Oesterholt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and position measuring method
Publication number
20060072089
Publication date
Apr 6, 2006
ASML NETHERLANDS B.V.
Emiel Jozef Melanie Eussen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050117141
Publication date
Jun 2, 2005
ASML NETHERLANDS B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050030512
Publication date
Feb 10, 2005
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050024620
Publication date
Feb 3, 2005
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus comprising a gas flushing system
Publication number
20040212791
Publication date
Oct 28, 2004
ASML NETHERLANDS B.V.
Pieter Klaas De Bokx
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Gas flushing system for use in lithographic apparatus
Publication number
20030006380
Publication date
Jan 9, 2003
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20020180940
Publication date
Dec 5, 2002
Raymond Laurentius Johannes Schrijver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY