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Tjarko Adriaan Rudolf VAN EMPEL
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Radiation source and lithographic apparatus including a contaminati...
Patent number
8,242,471
Issue date
Aug 14, 2012
ASML Netherlands B.V.
Wouter Anthon Soer
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,228,487
Issue date
Jul 24, 2012
ASML Netherlands B.V.
Albert Pieter Rijpma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method incorporatin...
Patent number
8,218,128
Issue date
Jul 10, 2012
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,115,900
Issue date
Feb 14, 2012
ASML Netherlands B.V.
Yuri Johannes Gabriël Van De Vijver
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic appararus and method
Patent number
8,094,287
Issue date
Jan 10, 2012
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with temperature sensor and device manufactu...
Patent number
8,072,575
Issue date
Dec 6, 2011
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus temperature compensation
Patent number
7,978,339
Issue date
Jul 12, 2011
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Assembly comprising a conditioning system and at least one object,...
Patent number
7,924,399
Issue date
Apr 12, 2011
ASML Netherlands B.V.
Ronald Van Der Ham
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Lithographic apparatus and method for conditioning an interior spac...
Patent number
7,728,951
Issue date
Jun 1, 2010
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with rotation filter device
Patent number
7,700,930
Issue date
Apr 20, 2010
ASML Netherlands B.V.
Edwin Johan Buis
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Lithographic apparatus, radiation system, device manufacturing meth...
Patent number
7,629,593
Issue date
Dec 8, 2009
ASML Netherlands B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method for manufacturing a device
Patent number
7,542,127
Issue date
Jun 2, 2009
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,528,935
Issue date
May 5, 2009
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method incorporatin...
Patent number
7,492,441
Issue date
Feb 17, 2009
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,446,849
Issue date
Nov 4, 2008
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas shower, lithographic apparatus and use of a gas shower
Patent number
7,432,513
Issue date
Oct 7, 2008
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method of a manufacturing device
Patent number
7,327,438
Issue date
Feb 5, 2008
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and position measuring method
Patent number
7,310,130
Issue date
Dec 18, 2007
ASML Netherlands B.V.
Emiel Jozef Melanie Eussen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Using unflatness information of the substrate table or mask table f...
Patent number
7,239,368
Issue date
Jul 3, 2007
ASML Netherlands B.V.
Rene Oesterholt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,227,612
Issue date
Jun 5, 2007
ASML Netherlands B.V.
Antonius Johannes Van Der Net
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,161,662
Issue date
Jan 9, 2007
ASML Netherlands B.V.
Joost Jeroen Ottens
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,119,885
Issue date
Oct 10, 2006
ASML Netherlands B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,113,262
Issue date
Sep 26, 2006
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, substrate holder and method of manufacturing
Patent number
7,110,085
Issue date
Sep 19, 2006
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,110,091
Issue date
Sep 19, 2006
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus comprising a gas flushing system
Patent number
7,106,412
Issue date
Sep 12, 2006
ASML Netherlands B.V.
Pieter Klaas De Bokx
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas flushing system for use in lithographic apparatus
Patent number
6,933,513
Issue date
Aug 23, 2005
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120147348
Publication date
Jun 14, 2012
ASML NETHERLANDS B.V.
Yuri Johannes Gabriel VAN DE VIJVER
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND SYSTEM FOR THERMALLY CONDITIONING AN OPTICAL ELEMENT
Publication number
20110310368
Publication date
Dec 22, 2011
ASML Netherlands B.V.
Roger Wilhelmus Antonius Henricus Schmitz
G02 - OPTICS
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRES...
Publication number
20110261329
Publication date
Oct 27, 2011
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Assembly Comprising a Conditioning System and at Least One Object,...
Publication number
20110188049
Publication date
Aug 4, 2011
ASML NETHERLANDS B.V.
Ronald VAN DER HAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20100238424
Publication date
Sep 23, 2010
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf VAN EMPEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DICHROIC MIRROR, METHOD FOR MANUFACTURING A DICHROIC MIRROR, LITHOG...
Publication number
20090284728
Publication date
Nov 19, 2009
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf VAN EMPEL
G02 - OPTICS
Information
Patent Application
RADIATION SOURCE
Publication number
20090272917
Publication date
Nov 5, 2009
ASML NETHERLANDS B.V.
Wouter Anthon Soer
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic Apparatus with Temperature Sensor and Device Manufactu...
Publication number
20090213344
Publication date
Aug 27, 2009
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf VAN EMPEL
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090207392
Publication date
Aug 20, 2009
ASML NETHERLANDS B.V.
Albert Pieter RIJPMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method Incorporatin...
Publication number
20090190111
Publication date
Jul 30, 2009
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf VAN EMPEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
Publication number
20090090877
Publication date
Apr 9, 2009
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus with rotation filter device
Publication number
20090073401
Publication date
Mar 19, 2009
ASML NETHERLANDS B.V.
Edwin Johan Buis
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Lithographic appararus and method
Publication number
20090027638
Publication date
Jan 29, 2009
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Gas shower, lithographic apparatus and use of a gas shower
Publication number
20070090301
Publication date
Apr 26, 2007
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20060158638
Publication date
Jul 20, 2006
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060055899
Publication date
Mar 16, 2006
ASML NETHERLANDS B.V.
Antonius Johannes Van Der Net
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060017894
Publication date
Jan 26, 2006
ASML NETHERLAND B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050030515
Publication date
Feb 10, 2005
ASML NETHERLANDS B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method of a manufacturing device
Publication number
20050002010
Publication date
Jan 6, 2005
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, substrate holder and method of manufacturing
Publication number
20040247361
Publication date
Dec 9, 2004
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY