Tobias BUSSENIUS

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Berlin, DE

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Patents Grantslast 30 patents

Information Patent Grant
Wafer-like substrate processing method and apparatus
- Patent number 10,832,929
- Issue date Nov 10, 2020
- Atotech Deutschland GmbH
- Ralph Rauenbusch
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate holder for vertical galvanic metal deposition
- Patent number 10,407,793
- Issue date Sep 10, 2019
- Atotech Deutschland GmbH
- Arnulf Fendel
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate holder reception apparatus
- Patent number 10,260,161
- Issue date Apr 16, 2019
- Atotech Deutschland GmbH
- Ralph Rauenbusch
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
WAFER-LIKE SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20190341287
- Publication date Nov 7, 2019
- Atotech Deutschland GmbH
- Ralph RAUENBUSCH
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDER RECEPTION APPARATUS
- Publication number 20180347064
- Publication date Dec 6, 2018
- Atotech Deutschland GmbH
- Ralph RAUENBUSCH
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDER FOR VERTICAL GALVANIC METAL DEPOSITION
- Publication number 20170321344
- Publication date Nov 9, 2017
- Atotech Deutschland GmbH
- Arnulf FENDEL
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR