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Tobias Hoose
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Karlsruhe, DE
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last 30 patents
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Patent Grant
Method and device for lithographically producing a target structure...
Patent number
11,630,394
Issue date
Apr 18, 2023
Karlsruhe Institute of Technology
Christian Koos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method and device for lithographically producing a target structure...
Patent number
11,143,966
Issue date
Oct 12, 2021
Karlsruhe Institute of Technology
Christian Koos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
METHOD AND DEVICE FOR LITHOGRAPHICALLY PRODUCING A TARGET STRUCTURE...
Publication number
20210405537
Publication date
Dec 30, 2021
Karlsruhe Institute of Technology
Christian Koos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR LITHOGRAPHICALLY PRODUCING A TARGET STRUCTURE...
Publication number
20190163067
Publication date
May 30, 2019
Karlsruhe Institute of Technology
Christian Koos
G02 - OPTICS