Tobias Pflanz

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Munchen, DE

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Patents Grantslast 30 patents

Information Patent Grant
High repetition rate gas discharge laser with precise pulse timing...
- Patent number 7,149,234
- Issue date Dec 12, 2006
- Cymer, Inc.
- Palash P. Das
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge laser, method of operating a gas discharge laser, and...
- Patent number 6,798,814
- Issue date Sep 28, 2004
- TuiLaser AG
- Stephan Geiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High repetition rate gas discharge laser with precise pulse timing...
- Patent number 6,618,421
- Issue date Sep 9, 2003
- Cymer, Inc.
- Palash P. Das
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
High repetition rate gas discharge laser with precise pulse timing...
- Publication number 20040047386
- Publication date Mar 11, 2004
- Palash P. Das
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Gas discharge laser, method of operating a gas discharge laser, and...
- Publication number 20030039291
- Publication date Feb 27, 2003
- Stephan Geiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High repetition rate gas discharge laser with precise pulse timing...
- Publication number 20020012376
- Publication date Jan 31, 2002
- Palash P. Das
- H01 - BASIC ELECTRIC ELEMENTS