Todd A. Lopes

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Livermore, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Halogen removal module and associated systems and methods
- Patent number 10,903,065
- Issue date Jan 26, 2021
- Lam Research Corporation
- Travis R. Taylor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module gas recirculation
- Patent number 10,566,216
- Issue date Feb 18, 2020
- Lam Research Corporation
- Brandon Lee Senn
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EQUIPMENT FRONT END MODULE GAS RECIRCULATION
- Publication number 20180358239
- Publication date Dec 13, 2018
- LAM RESEARCH CORPORATION
- Brandon Lee Senn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Halogen Removal Module and Associated Systems and Methods
- Publication number 20180330942
- Publication date Nov 15, 2018
- LAM RESEARCH CORPORATION
- Travis R. Taylor
- B08 - CLEANING