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Todd C. Bailey
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Hopewell Junction, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Process-metrology reproducibility bands for lithographic photomasks
Patent number
10,210,292
Issue date
Feb 19, 2019
International Business Machines Corporation
Todd C. Bailey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Process-metrology reproducibility bands for lithographic photomasks
Patent number
9,928,316
Issue date
Mar 27, 2018
International Business Machines Corporation
Todd C. Bailey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of automatic fluid dispensing for imprint lithography processes
Patent number
9,223,202
Issue date
Dec 29, 2015
Board of Regents, The University of Texas System
Byung-Jin Choi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Alignment method for semiconductor processing
Patent number
8,514,374
Issue date
Aug 20, 2013
International Business Machines Corporation
Todd C. Bailey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Structure resulting from chemical shrink process over BARC (bottom...
Patent number
8,491,984
Issue date
Jul 23, 2013
International Business Machines Corporation
Todd Christopher Bailey
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Pattern recognition with edge correction for design based metrology
Patent number
8,495,527
Issue date
Jul 23, 2013
International Business Machines Corporation
Todd C. Bailey
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Pattern recognition with edge correction for design based metrology
Patent number
8,429,570
Issue date
Apr 23, 2013
International Business Machines Corporation
Todd C. Bailey
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method of enhancing photoresist adhesion to rare earth oxides
Patent number
8,415,212
Issue date
Apr 9, 2013
FREESCALE SEMICONDUCTOR, INC.
James K. Schaeffer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for semiconductor device fabrication using modeling
Patent number
8,359,562
Issue date
Jan 22, 2013
Infineon Technologies AG
Chandrasekhar Sarma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Stray light feedback for dose control in semiconductor lithography...
Patent number
8,330,937
Issue date
Dec 11, 2012
Infineon Technologies AG
Sajan Marokkey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for performing chemical shrink process over BARC (bottom ant...
Patent number
8,110,496
Issue date
Feb 7, 2012
International Business Machines Corporation
Todd Christopher Bailey
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Device for holding a template for use in imprint lithography
Patent number
8,033,814
Issue date
Oct 11, 2011
Board of Regents, The University of Texas System
Todd C. Bailey
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Mask forming and implanting methods using implant stopping layer
Patent number
7,998,871
Issue date
Aug 16, 2011
International Business Machines Corporation
Katherina Babich
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Variable fill and cheese for mitigation of BEOL topography
Patent number
7,926,006
Issue date
Apr 12, 2011
International Business Machines Corporation
Todd C Bailey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Device for holding a template for use in imprint lithography
Patent number
7,708,542
Issue date
May 4, 2010
Board of Regents, The University of Texas System
Todd C. Bailey
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Mask forming and implanting methods using implant stopping layer an...
Patent number
7,651,947
Issue date
Jan 26, 2010
International Business Machines Corporation
Katherina Babich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stray light feedback for dose control in semiconductor lithography...
Patent number
7,583,362
Issue date
Sep 1, 2009
Infineon Technologies AG
Sajan Marokkey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Ribs for line collapse prevention in damascene structures
Patent number
7,514,356
Issue date
Apr 7, 2009
Infineon Technologies AG
Sajan Marokkey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprint lithography system to produce light to impinge upon and pol...
Patent number
7,303,383
Issue date
Dec 4, 2007
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method for performing chemical shrink process over BARC (bottom ant...
Patent number
7,288,478
Issue date
Oct 30, 2007
International Business Machines Corporation
Todd Christopher Bailey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprint lithography template having a feature size under 250 nm
Patent number
7,229,273
Issue date
Jun 12, 2007
Board of Regents, The University of Texas System
Todd C. Bailey
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method of determining alignment of a template and a substrate havin...
Patent number
7,186,483
Issue date
Mar 6, 2007
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method for performing chemical shrink process over BARC (bottom ant...
Patent number
7,083,898
Issue date
Aug 1, 2006
International Business Machines Corporation
Todd C. Bailey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of creating a dispersion of a liquid on a substrate
Patent number
7,060,324
Issue date
Jun 13, 2006
Board of Regents, The University of Texas System
Todd Bailey
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method of aligning a template with a substrate employing moire patt...
Patent number
6,986,975
Issue date
Jan 17, 2006
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Methods for high-precision gap and orientation sensing between a tr...
Patent number
6,954,275
Issue date
Oct 11, 2005
Boards of Regents, The University of Texas System
Byung J. Choi
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
High-resolution overlay alignment methods for imprint lithography
Patent number
6,921,615
Issue date
Jul 26, 2005
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
High resolution overlay alignment systems for imprint lithography
Patent number
6,919,152
Issue date
Jul 19, 2005
Board of Regents, The University of Texas System
S. V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method of varying template dimensions to achieve alignment during i...
Patent number
6,916,585
Issue date
Jul 12, 2005
Board of Regents, The University of Texas Systems
Sidlgata V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Dual wavelength method of determining a relative position of a subs...
Patent number
6,902,853
Issue date
Jun 7, 2005
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
PROCESS-METROLOGY REPRODUCIBILITY BANDS FOR LITHOGRAPHIC PHOTOMASKS
Publication number
20180101630
Publication date
Apr 12, 2018
International Business Machines Corporation
Todd C. Bailey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESS-METROLOGY REPRODUCIBILITY BANDS FOR LITHOGRAPHIC PHOTOMASKS
Publication number
20160283617
Publication date
Sep 29, 2016
International Business Machines Corporation
Todd C. Bailey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
System and Method for Semiconductor Device Fabrication Using Modeling
Publication number
20120179282
Publication date
Jul 12, 2012
INFINEON TECHNOLOGIES NORTH AMERICA CORP.
Chandrasekhar Sarma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern Recognition with Edge Correction for Design Based Metrology
Publication number
20120110522
Publication date
May 3, 2012
International Business Machines Corporation
Todd C. Bailey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN RECOGNITION WITH EDGE CORRECTION FOR DESIGN BASED METROLOGY
Publication number
20120110523
Publication date
May 3, 2012
International Business Machines Corporation
Todd C. Bailey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
STRUCTURE RESULTING FROM CHEMICAL SHRINK PROCESS OVER BARC (BOTTOM...
Publication number
20120076982
Publication date
Mar 29, 2012
International Business Machines Corporation
Todd Christopher Bailey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Enhancing Photoresist Adhesion to Rare Earth Oxides
Publication number
20110223756
Publication date
Sep 15, 2011
James K. Schaeffer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALIGNMENT METHOD FOR SEMICONDUCTOR PROCESSING
Publication number
20110102760
Publication date
May 5, 2011
International Business Machines Corporation
Todd C. Bailey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device for Holding a Template for Use in Imprint Lithography
Publication number
20100173033
Publication date
Jul 8, 2010
Board of Regents, The University of Texas System
Todd Bailey
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Stray Light Feedback for Dose Control in Semiconductor Lithography...
Publication number
20090284726
Publication date
Nov 19, 2009
Sajan Marokkey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imprint Lithography Templates Having Alignment Marks
Publication number
20090214689
Publication date
Aug 27, 2009
Board of Regents, The University of Texas System
Todd C. Bailey
B82 - NANO-TECHNOLOGY
Information
Patent Application
MASK FORMING AND IMPLANTING METHODS USING IMPLANT STOPPING LAYER
Publication number
20090004869
Publication date
Jan 1, 2009
Katherina Babich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK HAVING IMPLANT STOPPING LAYER
Publication number
20080286545
Publication date
Nov 20, 2008
Katherina Babich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE FILL AND CHEESE FOR MITIGATION OF BEOL TOPOGRAPHY
Publication number
20080203589
Publication date
Aug 28, 2008
International Business Machines Corporation
Todd C. Bailey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of Automatic Fluid Dispensing for Imprint Lithography Processes
Publication number
20080199816
Publication date
Aug 21, 2008
THE UNIVERSITY OF TEXAS BOARD OF REGENTS
Byung J. Choi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Imprint Lithography Template Having a Feature Size Under 250 nm
Publication number
20080095878
Publication date
Apr 24, 2008
Board of Regents, University of Texas System
Todd Bailey
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
METHOD FOR PERFORMING CHEMICAL SHRINK PROCESS OVER BARC (BOTTOM ANT...
Publication number
20080020198
Publication date
Jan 24, 2008
Todd Christopher Bailey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK FORMING AND IMPLANTING METHODS USING IMPLANT STOPPING LAYER AN...
Publication number
20070275563
Publication date
Nov 29, 2007
International Business Machines Corporation
Katherina Babich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BOTTOM ANTI-REFLECTIVE COATING
Publication number
20070275330
Publication date
Nov 29, 2007
International Business Machines Corporation
Todd C. Bailey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT LITHOGRAPHY SYSTEM TO PRODUCE LIGHT TO IMPINGE UPON AND POL...
Publication number
20070264588
Publication date
Nov 15, 2007
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
METHOD FOR PERFORMING CHEMICAL SHRINK PROCESS OVER BARC (BOTTOM ANT...
Publication number
20070010091
Publication date
Jan 11, 2007
International Business Machines Corporation
Todd Christopher Bailey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ribs for line collapse prevention in damascene structures
Publication number
20060199369
Publication date
Sep 7, 2006
Sajan Marokkey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR WIRELESS IP ADDRESS CAPACITY OPTIMIZATION
Publication number
20060153118
Publication date
Jul 13, 2006
International Business Machines Corporation
Todd C. Bailey
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Release layer comprising diamond-like carbon (DLC) or doped DLC wit...
Publication number
20060145398
Publication date
Jul 6, 2006
Board of Regents, The University of Texas System
Todd C. Bailey
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Stray light feedback for dose control in semiconductor lithography...
Publication number
20060110666
Publication date
May 25, 2006
Sajan Marokkey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imprint lithography templates having alignment marks
Publication number
20050064344
Publication date
Mar 24, 2005
University of Texas System Board of Regents
Todd C. Bailey
B82 - NANO-TECHNOLOGY
Information
Patent Application
Dual wavelength method of determining a relative position of a subs...
Publication number
20040209177
Publication date
Oct 21, 2004
Board of Regents, The University of Texas System
S.V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Method of determining alignment of a template and a substrate havin...
Publication number
20040189994
Publication date
Sep 30, 2004
Board of Regents, The University of Texas System
S. V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Method of aligning a template with a substrate employing moire patt...
Publication number
20040189996
Publication date
Sep 30, 2004
Board of Regents, The University of Texas System
S. V. Sreenivasan
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Imprint lithography template having a feature size under 250 nm
Publication number
20040168586
Publication date
Sep 2, 2004
Board of Regents, The University of Texas System
Todd Bailey
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL