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Todd David Hiar
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Gilbert, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method with radiati...
Patent number
8,937,705
Issue date
Jan 20, 2015
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduced pitch multiple exposure process
Patent number
7,981,595
Issue date
Jul 19, 2011
ASML Netherlands B.V.
Theodore A. Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduced pitch multiple exposure process
Patent number
7,906,270
Issue date
Mar 15, 2011
ASML Netherlands B.V.
Theodore A Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduced pitch multiple exposure process
Patent number
7,781,149
Issue date
Aug 24, 2010
ASML Netherlands B.V.
Theodore Allen Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic attribute enhancement
Patent number
7,738,075
Issue date
Jun 15, 2010
ASML Netherlands B.V.
Todd D. Hiar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Integrated lithographic fabrication cluster
Patent number
7,274,429
Issue date
Sep 25, 2007
ASML Netherlands B.V.
Theodore A. Paxton
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Wafer processing apparatus and method of use
Patent number
7,019,268
Issue date
Mar 28, 2006
ASML Netherlands B.V.
Theodore A. Paxton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive lithographic critical dimension enhancement
Patent number
6,873,938
Issue date
Mar 29, 2005
ASML Netherlands B.V.
Theodore A. Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
REDUCED PITCH MULTIPLE EXPOSURE PROCESS
Publication number
20110244401
Publication date
Oct 6, 2011
ASML NETHERLANDS B.V.
Theodore A. PAXTON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method with Radiati...
Publication number
20090219500
Publication date
Sep 3, 2009
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method that compens...
Publication number
20070046917
Publication date
Mar 1, 2007
ASML NETHERLANDS B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reduced pitch multiple exposure process
Publication number
20070003878
Publication date
Jan 4, 2007
ASML NETHERLANDS B.V.
Theodore A. Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic attribute enhancement
Publication number
20060262287
Publication date
Nov 23, 2006
ASML NETHERLANDS B.V.
Todd D. Hiar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reduced pitch multiple exposure process
Publication number
20060216653
Publication date
Sep 28, 2006
ASML NETHERLANDS B.V.
Theodore Allen Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reduced pitch multiple exposure process
Publication number
20060216649
Publication date
Sep 28, 2006
ASML NETHERLANDS B.V.
Theodore A. Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wafer processing apparatus and method of use
Publication number
20050184043
Publication date
Aug 25, 2005
ASML NETHERLANDS B.V.
Theodore A. Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Integrated lithographic fabrication cluster
Publication number
20050128464
Publication date
Jun 16, 2005
ASML NETHERLANDS B.V.
Theodore A. Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ADAPTIVE LITHOGRAPHIC CRITICAL DIMENSION ENHANCEMENT
Publication number
20050075819
Publication date
Apr 7, 2005
ASML NETHERLANDS B.V.
Theodore A. Paxton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY