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Todd K. Maciej
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Little Falls, MN, US
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Patents Grants
last 30 patents
Information
Patent Grant
Magnetic integrated lift pin system for a chemical processing chamber
Patent number
11,545,387
Issue date
Jan 3, 2023
TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
William Inhofer
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Reduced footprint tool for automated processing of microelectronic...
Patent number
7,134,827
Issue date
Nov 14, 2006
FSI International, Inc.
Robert E. Larson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced footprint tool for automated processing of microelectronic...
Patent number
6,979,165
Issue date
Dec 27, 2005
FSI International, Inc.
Robert E. Larson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge gripping device for handling a set of semiconductor wafers in...
Patent number
6,845,779
Issue date
Jan 25, 2005
FSI International, Inc.
Tim W. Herbst
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Magnetic Integrated Lift Pin System for a Chemical Processing Chamber
Publication number
20200020566
Publication date
Jan 16, 2020
TEL FSI, Inc.
William Inhofer
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Reduced footprint tool for automated processing of microelectronic...
Publication number
20050063799
Publication date
Mar 24, 2005
Robert E. Larson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor wafer cleaning systems and methods
Publication number
20030098047
Publication date
May 29, 2003
Tim W. Herbst
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Reduced footprint tool for automated processing of microelectronic...
Publication number
20030091410
Publication date
May 15, 2003
Robert E. Larson
H01 - BASIC ELECTRIC ELEMENTS