Todd M. Petit

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Livermore, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Optical metrology with purged reference chip
- Patent number 10,082,461
- Issue date Sep 25, 2018
- Nanometrics Incorporated
- Andrew S. Klassen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL METROLOGY WITH PURGED REFERENCE CHIP
- Publication number 20160033399
- Publication date Feb 4, 2016
- Nanometrics Incorporated
- Andrew S. KLASSEN
- G01 - MEASURING TESTING