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Todd M. Petit
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Livermore, CA, US
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last 30 patents
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Patent Grant
Optical metrology with purged reference chip
Patent number
10,082,461
Issue date
Sep 25, 2018
Nanometrics Incorporated
Andrew S. Klassen
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
OPTICAL METROLOGY WITH PURGED REFERENCE CHIP
Publication number
20160033399
Publication date
Feb 4, 2016
Nanometrics Incorporated
Andrew S. KLASSEN
G01 - MEASURING TESTING