Todd R. DOWNEY

Person

Monroe, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and illumination uniformity correction system
- Patent number 11,656,555
- Issue date May 23, 2023
- ASML Holding N.V.
- Janardan Nath
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for illumination uniformity corre...
- Patent number 8,629,973
- Issue date Jan 14, 2014
- ASML Holding N.V.
- Richard Carl Zimmerman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for lithographic illuminator beam deviation mea...
- Patent number 7,821,625
- Issue date Oct 26, 2010
- ASML Holding N.V.
- Todd R. Downey
- G01 - MEASURING TESTING
Information Patent Grant
Refractive index sensor utilizing gold island surface plasmon reson...
- Patent number 7,630,080
- Issue date Dec 8, 2009
- ASML Holding N.V.
- Todd R. Downey
- G01 - MEASURING TESTING
Information Patent Grant
Refractive index sensor utilizing gold island surface plasmon reson...
- Patent number 7,426,034
- Issue date Sep 16, 2008
- ASML Holding N.V.
- Todd R. Downey
- G01 - MEASURING TESTING
Information Patent Grant
Refractive index sensor utilizing gold island surface plasmon reson...
- Patent number 7,253,888
- Issue date Aug 7, 2007
- ASML Holding N.V.
- Todd R. Downey
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC METHOD TO ENHANCE ILLUMINATOR TRANSMISSION
- Publication number 20240353756
- Publication date Oct 24, 2024
- ASML NETHERLANDS B.V.
- Todd R. DOWNEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FAST UNIFORMITY DRIFT CORRECTION
- Publication number 20240319608
- Publication date Sep 26, 2024
- ASML Holding N.V.
- Roberto B. WIENER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION
- Publication number 20230035511
- Publication date Feb 2, 2023
- ASML NETHERLANDS B.V.
- Ronny DER KINDEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTIMIZATION USING A NON-UNIFORM ILLUMINATION INTENSITY PROFILE
- Publication number 20220390832
- Publication date Dec 8, 2022
- ASML Holding N.V.
- Janardan NATH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM
- Publication number 20220214622
- Publication date Jul 7, 2022
- ASML Holding N.V.
- Janardan NATH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method for Illumination Uniformity Corre...
- Publication number 20100302525
- Publication date Dec 2, 2010
- ASML Holding N.V.
- Richard Carl ZIMMERMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Systems and Methods for Lithographic Illuminator Beam Deviation Mea...
- Publication number 20090161093
- Publication date Jun 25, 2009
- ASML Holding N.V.
- Todd R. DOWNEY
- G01 - MEASURING TESTING
Information Patent Application
Refractive Index Sensor Utilizing Gold Island Surface Plasmon Reson...
- Publication number 20090015841
- Publication date Jan 15, 2009
- ASML Holding N.V.
- Todd R. DOWNEY
- G01 - MEASURING TESTING
Information Patent Application
Refractive Index Sensor Utilizing Gold Island Surface Plasmon Reson...
- Publication number 20070268479
- Publication date Nov 22, 2007
- ASML Holding, N.V.
- Todd R. Downey
- G01 - MEASURING TESTING
Information Patent Application
Refractive index sensor utilizing gold island surface plasmon reson...
- Publication number 20060066859
- Publication date Mar 30, 2006
- ASML Holding N.V.
- Todd R. Downey
- G01 - MEASURING TESTING

Todd R. DOWNEY

Person

Patents Grantslast 30 patents

Lithographic apparatus and illumination uniformity correction system

Lithographic apparatus and method for illumination uniformity corre...

Systems and methods for lithographic illuminator beam deviation mea...

Refractive index sensor utilizing gold island surface plasmon reson...

Refractive index sensor utilizing gold island surface plasmon reson...

Refractive index sensor utilizing gold island surface plasmon reson...

Patents Applicationslast 30 patents

LITHOGRAPHIC METHOD TO ENHANCE ILLUMINATOR TRANSMISSION

FAST UNIFORMITY DRIFT CORRECTION

LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION

OPTIMIZATION USING A NON-UNIFORM ILLUMINATION INTENSITY PROFILE

LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM

Lithographic Apparatus and Method for Illumination Uniformity Corre...

Systems and Methods for Lithographic Illuminator Beam Deviation Mea...

Refractive Index Sensor Utilizing Gold Island Surface Plasmon Reson...

Refractive Index Sensor Utilizing Gold Island Surface Plasmon Reson...

Refractive index sensor utilizing gold island surface plasmon reson...