Tohru Ikeda

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam exposure method and apparatus
- Patent number 5,895,924
- Issue date Apr 20, 1999
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron-beam exposure device and a method of detecting a mark posi...
- Patent number 5,708,276
- Issue date Jan 13, 1998
- Fujitsu Limited
- Tatsuro Ohkawa
- H01 - BASIC ELECTRIC ELEMENTS