Tohru IWABAE

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Tosu City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Treating apparatus, treating method and recording medium
- Patent number 8,790,469
- Issue date Jul 29, 2014
- Tokyo Electron Limited
- Takafumi Tsuchiya
- B08 - CLEANING
Information Patent Grant
Substrate processing system and substrate transfer method
- Patent number 8,079,797
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Osamu Tanaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
TREATING APPARATUS, TREATING METHOD AND RECORDING MEDIUM
- Publication number 20100163077
- Publication date Jul 1, 2010
- TOKYO ELECTRON LIMITED
- Takafumi TSUCHIYA
- B08 - CLEANING
Information Patent Application
Substrate processing system and substrate transfer method
- Publication number 20090097950
- Publication date Apr 16, 2009
- TOKYO ELECTRON LIMITED
- Osamu Tanaka
- H01 - BASIC ELECTRIC ELEMENTS