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Tohru Kohda
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Exposure apparatus and device manufacturing method
Patent number
8,035,668
Issue date
Oct 11, 2011
Canon Kabushiki Kaisha
Mitsuro Sugita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning exposure apparatus and method
Patent number
6,947,122
Issue date
Sep 20, 2005
Canon Kabushiki Kaisha
Tohru Kohda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
IMPRINT APPARATUS AND METHOD
Publication number
20100233377
Publication date
Sep 16, 2010
Canon Kabushiki Kaisha
Akio Aoki
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20060158504
Publication date
Jul 20, 2006
Mitsuro Sugita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scanning exposure apparatus and method
Publication number
20050206867
Publication date
Sep 22, 2005
Canon Kabushiki Kaisha
Tohru Kohda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scanning exposure apparatus and method
Publication number
20040001191
Publication date
Jan 1, 2004
Canon Kabushiki Kaisha
Tohru Kohda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY