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Tohru Komatsu
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Yokosuka-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Refractory metal silicide target, method of manufacturing the targe...
Patent number
6,352,628
Issue date
Mar 5, 2002
Kabushiki Kaisha Toshiba
Michio Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Refractory metal silicide target, method of manufacturing the targe...
Patent number
6,309,593
Issue date
Oct 30, 2001
Kabushiki Kaisha Toshiba
Michio Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Refractory metal silicide target, method of manufacturing the targe...
Publication number
20010037938
Publication date
Nov 8, 2001
KABUSHIKI KAISHA TOSHIBA
Michio Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...