Tohru Satake

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 9,406,480
- Issue date Aug 2, 2016
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Electro-optical inspection apparatus using electron beam
- Patent number 9,390,886
- Issue date Jul 12, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 9,368,314
- Issue date Jun 14, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,946,631
- Issue date Feb 3, 2015
- Ebara Corporation
- Nobuharu Noji
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 8,822,919
- Issue date Sep 2, 2014
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,803,103
- Issue date Aug 12, 2014
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,742,341
- Issue date Jun 3, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Sample surface inspection apparatus and method
- Patent number 8,674,317
- Issue date Mar 18, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,368,031
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and a device manufacturing method by using...
- Patent number 8,368,016
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of controlling electron beam focusing of pierce-type electro...
- Patent number 8,198,797
- Issue date Jun 12, 2012
- ULVAC, Inc.
- Eiichi Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mapping-projection-type electron beam apparatus for inspecting samp...
- Patent number 8,124,933
- Issue date Feb 28, 2012
- Ebara Corporation
- Kenji Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Sample surface inspection apparatus and method
- Patent number 8,076,654
- Issue date Dec 13, 2011
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus
- Patent number 8,067,732
- Issue date Nov 29, 2011
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,053,726
- Issue date Nov 8, 2011
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 7,928,378
- Issue date Apr 19, 2011
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,888,642
- Issue date Feb 15, 2011
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sheet beam-type testing apparatus
- Patent number 7,829,871
- Issue date Nov 9, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,745,784
- Issue date Jun 29, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 7,741,601
- Issue date Jun 22, 2010
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,601,972
- Issue date Oct 13, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Method of electric discharge machining a cathode for an electron gun
- Patent number 7,598,471
- Issue date Oct 6, 2009
- Ebara Corporation
- Muneki Hamashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mapping-projection-type electron beam apparatus for inspecting samp...
- Patent number 7,592,586
- Issue date Sep 22, 2009
- Ebara Corporation
- Kenji Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam inspection system and inspection method and method of...
- Patent number 7,569,838
- Issue date Aug 4, 2009
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
TDI detecting device, a feed-through equipment, an electron beam ap...
- Patent number 7,521,692
- Issue date Apr 21, 2009
- Ebara Corporation
- Masahiro Hatakeyama
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Electron beam apparatus and device manufacturing method using the same
- Patent number 7,479,634
- Issue date Jan 20, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Detecting apparatus and device manufacturing method
- Patent number 7,449,691
- Issue date Nov 11, 2008
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and device production method using the elec...
- Patent number 7,439,502
- Issue date Oct 21, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus, a device manufacturing method using the sa...
- Patent number 7,425,703
- Issue date Sep 16, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,423,267
- Issue date Sep 9, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20150122993
- Publication date May 7, 2015
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
- Publication number 20140367570
- Publication date Dec 18, 2014
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140319346
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20140158885
- Publication date Jun 12, 2014
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140034831
- Publication date Feb 6, 2014
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING...
- Publication number 20130032716
- Publication date Feb 7, 2013
- EBARA CORPORATION
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Application
SAMPLE SURFACE INSPECTION APPARATUS AND METHOD
- Publication number 20120049063
- Publication date Mar 1, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20120032079
- Publication date Feb 9, 2012
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...
- Publication number 20110104830
- Publication date May 5, 2011
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20100237243
- Publication date Sep 23, 2010
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam Apparatus
- Publication number 20100213370
- Publication date Aug 26, 2010
- Mamoru Nakasuji
- G02 - OPTICS
Information Patent Application
Method of Controlling Electron Beam Focusing of Pierce-Type Electro...
- Publication number 20100026161
- Publication date Feb 4, 2010
- Ulvac, Inc.
- Eiichi Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAPPING-PROJECTION-TYPE ELECTRON BEAM APPARATUS FOR INSPECTING SAMP...
- Publication number 20100019149
- Publication date Jan 28, 2010
- EBARA CORPORATION
- Kenji WATANABE
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20090218506
- Publication date Sep 3, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROJECTION ELECTRON BEAM APPARATUS AND DEFECT INSPECTION SYSTEM USI...
- Publication number 20090212213
- Publication date Aug 27, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Testing apparatus using charged particles and device manufacturing...
- Publication number 20090101816
- Publication date Apr 23, 2009
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20090050822
- Publication date Feb 26, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20090039262
- Publication date Feb 12, 2009
- EBARA CORPORATION
- Mamoru NAKASUJI
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20090032708
- Publication date Feb 5, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20090014649
- Publication date Jan 15, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Objective lens, electron beam system and method of inspecting defect
- Publication number 20080315090
- Publication date Dec 25, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus, a device manufacturing method using the sa...
- Publication number 20080315095
- Publication date Dec 25, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection with electron beam, method for operating s...
- Publication number 20080308729
- Publication date Dec 18, 2008
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
SHEET BEAM-TYPE TESTING APPARATUS
- Publication number 20080302963
- Publication date Dec 11, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Sample surface inspection apparatus and method
- Publication number 20080265159
- Publication date Oct 30, 2008
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20080173815
- Publication date Jul 24, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam inspection system and inspection method and method of...
- Publication number 20080173814
- Publication date Jul 24, 2008
- EBARA CORPORATION
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for inspecting substrate, substrate inspecting system and el...
- Publication number 20080121804
- Publication date May 29, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20080042060
- Publication date Feb 21, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
TDI detecting device, a feed-through equipment, an electron beam ap...
- Publication number 20080023651
- Publication date Jan 31, 2008
- EBARA CORPORATION
- Masahiro Hatakeyama
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Tohru Satake

Person

Patents Grantslast 30 patents

Testing apparatus using charged particles and device manufacturing...

Electro-optical inspection apparatus using electron beam

Inspection system by charged particle beam and method of manufactur...

Testing apparatus using charged particles and device manufacturing...

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Testing apparatus using charged particles and device manufacturing...

Sample surface inspection apparatus and method

Inspection system by charged particle beam and method of manufactur...

Electron beam apparatus and a device manufacturing method by using...

Method of controlling electron beam focusing of pierce-type electro...

Mapping-projection-type electron beam apparatus for inspecting samp...

Sample surface inspection apparatus and method

Electron beam apparatus

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Electron beam apparatus and method of manufacturing semiconductor d...

Sheet beam-type testing apparatus

Electron beam apparatus and method of manufacturing semiconductor d...

Testing apparatus using charged particles and device manufacturing...

Inspection system by charged particle beam and method of manufactur...

Method of electric discharge machining a cathode for an electron gun

Mapping-projection-type electron beam apparatus for inspecting samp...

Electron beam inspection system and inspection method and method of...

TDI detecting device, a feed-through equipment, an electron beam ap...

Electron beam apparatus and device manufacturing method using the same

Detecting apparatus and device manufacturing method

Electron beam apparatus and device production method using the elec...

Electron beam apparatus, a device manufacturing method using the sa...

Electron beam apparatus and method of manufacturing semiconductor d...

Patents Applicationslast 30 patents

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING...

SAMPLE SURFACE INSPECTION APPARATUS AND METHOD

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...

Testing apparatus using charged particles and device manufacturing...

Electron Beam Apparatus

Method of Controlling Electron Beam Focusing of Pierce-Type Electro...

MAPPING-PROJECTION-TYPE ELECTRON BEAM APPARATUS FOR INSPECTING SAMP...

ELECTRON BEAM APPARATUS

PROJECTION ELECTRON BEAM APPARATUS AND DEFECT INSPECTION SYSTEM USI...

Testing apparatus using charged particles and device manufacturing...

Electron beam apparatus and method of manufacturing semiconductor d...

ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...

Inspection system by charged particle beam and method of manufactur...

ELECTRON BEAM APPARATUS

Objective lens, electron beam system and method of inspecting defect

Electron beam apparatus, a device manufacturing method using the sa...

Apparatus for inspection with electron beam, method for operating s...

SHEET BEAM-TYPE TESTING APPARATUS

Sample surface inspection apparatus and method

Electron beam apparatus and device production method using the elec...

Electron beam inspection system and inspection method and method of...

Method for inspecting substrate, substrate inspecting system and el...

Inspection system by charged particle beam and method of manufactur...

TDI detecting device, a feed-through equipment, an electron beam ap...